Carbon monoxide gas sensing properties of Ga-doped ZnO film grown by ion plating with DC arc discharge
نویسندگان
چکیده
منابع مشابه
Properties of Highly Transparent Conductive Ga-Doped ZnO Films prepared on Polymer Substrates by Reactive Plasma Deposition with DC Arc Discharge
Highly transparent conductive polycrystalline Ga-doped ZnO (GZO) films with a thickness of about 100nm prepared on cyclo-olefin polymer (COP) or glass substrates at various temperatures below 90°C by ion plating with DC-arc discharge were investigated. A systematic study has been made of the influence of substrate temperature Ts on the structural, electrical, optical and residual stress propert...
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ژورنال
عنوان ژورنال: Journal of Sensors and Sensor Systems
سال: 2014
ISSN: 2194-878X
DOI: 10.5194/jsss-3-331-2014